• The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines, which are important items for ultra-precision manufacturing and nanomanufacturing. Optical sensors are being developed for measurement of angle and displacement, which are fundamental quantities for manufacturing. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as new multi-axis sensing methods are being The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines. Optical sensors are being developed for measurement of angle and displacement. A number of scanning-type measuring systems for precision measurement of surface forms and stage motions are also being developed. Error separation algorithms and systems for straightness and roundness, which are the most fundamental geometries treated in ultra-precision manufacturing, are being investigated. Novel systems based on scanning probe microscopy are under development for micro- and nano-structures as well as freeform optics in responding to new and important challenges from ultra-precision manufacturing and nanomanufacturing.

The multi-axis optical displacement and angle sensors developed in the laboratory are expected to measure motions of semiconductor/IC manufacturing and inspection equipment, precision machine tools, ultra-precision measuring instrument. The surface profile measurement systems are expected t play an important role in ultra-precision manufacturing and nanomanufacturing industries.

• Molecular-scale mechanism of solid-liquid affinity, wettability, thermal boundary resistance and molecular deposition are analyzed by molecular dynamics simulations toward its control. With a background of heat and mass transport and interfacial thermodynamics, transport phenomena of various scales ranging from spin coating of photoresist to SAM (self-assembled monolayer) and hydrophobic/hydrophilic treatment by attaching some molecular basis are studied. Futhermore, the molecular-scale mechanisms which determine thermophysical properties and the molecular structure that realizes desired thermophysical properties are studied. We can conduct effective collaboration and provide academic consultations to companies interested in our research.

• In order to solve the energy and environmental problems, the development of the high-functional and high-performance materials is required in a wide variety of research fields such as fuel cell, Li-ion battery, tribology etc. Especially, the recent material technologies constitute of multi-physics and multi-scale phenomena including chemical reaction, friction, impact, stress, fluid, photon, electron, heat, electric and magnetic fields etc. on nano- and macro-scales. Therefore, Kubo laboratory is pioneering the development of multi-physics and multi-scale simulator on the basis of quantum chemistry and is utilizing supercomputers "Fugaku" and "MASAMUNE-IMR" for realizing the theoretical material design with high-accuracy.

We utilize our developed multi-physics and multi-scale simulation technology on the basis of quantum chemistry for acceelerating the material development in a wide variety of private companies of automotive, machinery, power, electronics, material, metal, chemistry etc. and then contribute to solving the energy and environmental problems.

• We are doing theoretical research on electrical conductivity in magnetoresistive devices using highly spin-polarized materials. The aim is to achieve very functional spintronics devices such as read-out heads for ultrahigh-density magnetic recording and non-volatile spin memories. We also investigate magnetoresistive devices using perpendicularly magnetized materials to ensure endurance against thermal fluctuations of the magnetization. We successfully achieve a guideline for improvement of the magnetoresistive performance by designing the crystal structure at the interface between ferromagnets and oxides theoretically.
• We believe that first-principles calculations, which need no empirical parameter, play a very important role in research and development of various materials. Please contact us if you want to collaborate with us.

• Fukuyama laboratory studies novel material processing based on chemical thermodynamics with high-temperature thermophysical property measurements. As examples, we are developing new crystal growth processes to bring a breakthrough in nitride-semiconductor devices, which are promising materials for next-generation optical devices applied in environmental, medical, bio and information technologies fields. Database of thermophysical properties of materials is needed for modeling heat and mass transports in materials processes.

A new thermophysical property measurement system is currently under development, which enables accurate measurements of heat capacity, thermal conductivity, emissivity, density and surface tension of high-temperature melts, utilizing electromagnetic levitation in a dc magnetic field.

• Microwave processing is one of the attractive fields in recent materials processing. We perform various materials processing using non-equilibrium reaction field induced by microwave and/or ultrasonic irradiation. The topic contains powder metallurgy, nitride coatings, synthesis of new functional materials, fabrication of nanoparticles, etc. Recently we have developed a new TiN coating method using our microwave irradiation equipment operated at a frequency of 2.45 GHz. The method is simple but applicable to various substrates with complex shape. This method can be applied to various nitride coatings and will open a new coating technology in many fields of applications.

The major targets of TiN coatings are for cutting tools, ball bearings, dental implants, die and mold for stamping, and ornaments. The newly developed method makes it possible to perform nitride coatings within a short time using a standard microwave heating equipment. We hope to conduct collaborative research with a willing company for a practical application of these technology.

• Tactile sense and the sense of touch are multiple combinations of fundamental sensations, such as smooth and rough, soft and hard, dry and wet, and hot and cold sensations. These sensations are described with the information on force, distortion, temperature, stickiness and oscillation.
• A tactile sensor corresponding to several types of human skin sensory receptors and an active tactile sensor system that is an integrated sensor structure imitating human haptic motions have been developed. These sensor systems allowed measurement of "Kansei" words that are extremely vague tactile feelings, and roughness, softness and temperature sensations. However, tactile sense or the sense of touch also includes other sensations and combinations of them. Therefore, to develop a sensor, it is important to define how the sensations and physical information relating to the sensations are obtained and what relationships exist between them.
• In this research, the relationships between sensations, including fundamental sensations that have already been obtained and other sensations, and the relevant physical information are being investigated. Additionally, on the basis of the knowledge through the investigation, an advanced sensor system that allows obtaining haptic information is being developed.

The research is beneficial not only to life science but also to manufacturing fields.

• Toward the ultimate performances of image sensors, advanced research activities are being conducted that cover a wide range of technology fields from cleanroom infrastructure, materials, process equipment, process, device, circuit, assembly, signal processing, measurement/evaluation and reliability. Following technologies have been successfully commercialized:
• A fast and accurate measurement technology of electrical characteristics for over 1 million transistors
• A wide dynamic range CMOS image sensor technology capturing images over five decade brightness ranges
• An ultra-fast CMOS image sensor technology with 10 million frames/sec

Followings are available for industry collaborators:
A. 200mm-diameter-wafer silicon device fabrication utilizing the ultra-clean facility including wafer mutual fabrication processing between device manufacturers.
B. Process technology development and various kinds of analyses.
C. Development of new image sensors.

• General metallic biomaterials, such as stainless steels and conventional CoCr alloys, show a high Young's modulus ten times higher than that of human bones. This is an unfavored feature because it causes the so-called "stress shielding effect" when they are used as implants. β-type Ti alloys have a relatively lower Young's modulus, but they come with a compromise of low wear resistance. The current novel CoCr-based alloys are a breakthrough; they exhibit both a low Young's modulus similar to human bones and a high wear and corrosion resistance. Moreover, they exhibit superelasticity with a huge recoverable strain over 17%, also showing promise as shape memory alloys.

It is the first time that a low Young's modulus, a high corrosion and wear resistance, and a superior superelastic behavior are simultaneously obtained in a single material. The current novel CoCr-based alloys are promising for biomedical applications such as total hip or knee joint replacements, bone plates, spinal fixation devices, and vascular stents.