• General metallic biomaterials, such as stainless steels and conventional CoCr alloys, show a high Young's modulus ten times higher than that of human bones. This is an unfavored feature because it causes the so-called "stress shielding effect" when they are used as implants. β-type Ti alloys have a relatively lower Young's modulus, but they come with a compromise of low wear resistance. The current novel CoCr-based alloys are a breakthrough; they exhibit both a low Young's modulus similar to human bones and a high wear and corrosion resistance. Moreover, they exhibit superelasticity with a huge recoverable strain over 17%, also showing promise as shape memory alloys.

It is the first time that a low Young's modulus, a high corrosion and wear resistance, and a superior superelastic behavior are simultaneously obtained in a single material. The current novel CoCr-based alloys are promising for biomedical applications such as total hip or knee joint replacements, bone plates, spinal fixation devices, and vascular stents.

• For further social development, it is required the miniaturization, weight saving, high performance of various devices. We study on fiber, particle reinforced polymer, metal, ceramic matrices composite materials using our knowledge about materials mechanics and numerical simulation such as finite element method. We recently address to develop multi-functionalized composite materials, which have high strength, super lightweight, energy harvesting function, damage monitoring function, biodegradable at the same time.

• Microstructure represents various kinds of heterogeneities in the metallic materials, i.e., grains, component phase, lattice defects and chemical inhomogeneity such as impurity/alloying elements. It can be modified through control of phase transformation/precipitation and deformation/recrystallization by adjusting compositions of materials and/or through processing routes (heat treatment, deformation). Such expertise in micro/nanostructure control is very important in production of current materials from viewpoints of energy saving and recycling in structural materials such as steels and titanium alloys.
• We attempt to apply more advanced control of micro/nanostructures, such as atomic structures of crystalline interfaces, chemistory in an atomic scale (e.g., segregation) and so on. Fundamentals of microstructure formation (thermodynamics, kinetics, crystallography) are examined both theoretically and experimentally to clarify key factors for microstructure control. Another important aspect in our research is the improvement of mechanical property by microstructure manipulation.

Possibilities to establish new functions (e.g., superplasticity, shape memory/superelasticity) as well as superior mechanical properties (e.g., ultrahigh strength with high toughness/ductility) is also explored.

• The aim of our research are to obtain the high accuracy sensor system for the signals from the human body or electric devices and to obtain the system for approaching action to the human body by using the nano-scale controlled magnetic materials and by the development of the devices under the functions of the magnetics.
• We studied the mechanism of obtaining the magnetic anisotropy of the magnetic thin films for the sensitive magnetic sensors. We obtained a non-metal probe for high frequency magnetic field, and confirmed the probe can measure the high frequency magnetic field with its phase information. In addition, 3D position detecting system using magnetic markers was studied to improve its position accuracy. The study about the magnetic actuator driven by the external magnetic field was carried out for biomimetic robots using the rotational magnetic field, and small wireless pumps were obtained and clarified for their application for an artificial heart-support pump.

<Medical Applications>
Motion system for capsule endoscope, Support system for endoscopic surgery, Position detecting system (motion capture), Wireless pump for artificial heart
<Sensors>
Magnetic field sensors, Strain sensors, Wireless sensors
<Materials>
Electrical steels of ultra low loss, Electrochemicaly produced materials (structure controlled in nano-scale)

We offer shared facility for the development of semiconductor prototypes equipped with 4-inch, 6-inch and some 8-inch wafer fabrication tools available on an hourly basis. Know-how accumulated at Tohoku University is available, and staff provide maximum support for prototyping. The service is performed at the 1,200 m2 Super Clean Room on the second floor of the Junichi Nishizawa Memorial Research Centre at Tohoku University. For information on equipment and fees, see our website.

More than 10 experienced technical staff assist customer's usages. Standard process conditions for each process, such as etching and deposition, are provided. allowing customers to start prototyping immediately. Various materials other than silicon can also be supported.

• We support the development of devices and semiconductor materials such as MEMS, optical elements and RF components.
• Technical consultation on devices and processes before and during prototyping is also available.
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• 'Prototype lab' for device packaging is also available.
• The museums where you can learn about the history of semiconductors, measuring instruments and sensors are open.
• As part of Technology Co-creation for Semiconductor of Tohoku University, we promote R&D of semiconductors and the development of human resources.
• On-demand semiconductor human resource development programs for students and engineers are available.
• As a member of the MEXT's Advanced Research Infrastructure for Materials (ARIM) program, we are involved in sharing facility and data.

More than 310 companies have used our shared facility since its launch in 2010, not only from device manufacturers such as MEMS, but also from manufacturers of materials, mechanical components and equipment. To date, we have successfully supported the commercialization of about 10 devices.

• We are studying MEMS (Micro Electro Mechanical Systems) and related technologies, which are typically used for the input/output of information/communication devices, the safety of automobiles etc. Our representative topics include integrated sensors, piezoelectric devices, RF MEMS, micro energy devices and wafer-level packages. Our facilities are open-accessible and well equipped with a lot of tools for lithography, dry/wet etching, thin film deposition, wafer bonding, device mounting and evaluations, which can be operated by each researcher. Using these tools, a variety of MEMS are being prototyped. Also, new microfabrication tools are being developed by ourselves.

We are collaborating with many companies, from which visiting researchers are dispatched to our laboratory. We also accept companies which want to just use specific tools in our facilities. Consultation is always welcome.

• Micro and nano electro-mechanical systems (MEMS/NEMS) have completely changed human society in the past decades. Many devices that are taken for granted these days like smart phone, future car and drone would be unthinkable without them.
• The integration of various new kinds of materials, such as metallic glass and nanostructures into micro technologies allows us to create devices with novel performance and characteristics; examples include acoustic sensors and actuators, thermoelectric generators and wafer level packages.
• In collaboration with partners inside and outside Tohoku University, technologies are being developed that can be transferred to industry ranging from material integration and processes to packaging and reliability.

Wide collaboration in Microsystem technology is possible. We develop, implement and optimize processes, devices and systems until they are ready for use, keeping in mind reliability, yield and other important features for commercialization. We work with also with partners, such as Fraunhofer. Flexible interlinking of expertise and capacities with other research groups enables us to meet broad project requirements and create complex system solutions.