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"microfabrication" Keyword - 2 Result(s)
M
[Microfabrication]
| Design, fabrication and test of high performance miniaturized sensor and actuator systems | Froemel Joerg Eckhardt (Associate Professor) |
|---|---|
| Hands-On Access Fabrication Facility –Open Facility for MEMS and Semiconductor Prototyping– | Kentaro Totsu (Professor) |
