• We challenge to fabricate in vacuum-stabilized micro/nano-scale liquid materials, explore their novel chemicophysical properties and develop their vacuum processing applications. The representative examples include ultra thin film ionic liquid on the nanometer scale and advanced vapor-liquid-solid growth (VLS) of inorganic/organic materials, such as 4H- and 3C-SiC films, single crystal pentacene and a porous polymer film of plolythiophene.

Our research outcomes will contribute to the following research and development:
1) a next-generation semiconductor process with the merits of the wet process
2) a new purification process of organic semiconductors, by which some part of inorganic semiconductor materials would be replaced in response to the present world-wide shortage of semiconductors.

In addition, the consultation of how to use our ionic liquid-assisted vapor growth method in attempt to obtain organic single crystals is welcome.

• We developed both pH and Cl- imaging plates, which can visualize the pH and Cl- concentration on metal surfaces in acidic environments. The pH range is from 3.0 to 0.5, and Cl- concentration up to 4 M can be measured. Fluorescent dyes are successively used for pH and Cl- imaging in the field of biology, but their sensitivity tends to be insufficient in acidic and/or highly concentrated chloride solutions. A glass plate with a sol-gel sensing layer, which contains a pH indicator or a Cl- sensitive florescent dye was fabricated and validated using the solutions with various pH values and Cl- concentrations. Changes in the pH and Cl- distribution on stainless surface in an acidic environment were measured quantitatively.

The newly developed imaging plates can be used to investigate the mechanism of various chemical reactions, such as corrosion, which occurs in an acidic environment. Micro-flow imaging using our sensing technique will be a promising approach to understand the catalytic chemistry of metal surfaces.
強調

Colorful TiO2 Particle
https://www.t-technoarch.co.jp/data/anken_en/T19-849.pdf

Transition metal compounds are known to exhibit a wide variety of colors. Until now, it has been possible to color white titanium oxide by doping with transition metal ions, but it is difficult to avoid biotoxicity derived from transition metals.

• In the present invention, titanium oxide inorganic pigments that do not contain transition metals and have various colors such as white, yellow, red, gray, green, purple, black, and skin color have been realized.

New applications of titanium oxide pigments are expected in the cosmetics field, where biotoxicity is an issue.

• Conventional X-ray imaging methods that rely on X-ray attenuation cannot generate clear contrast in the observation of low-density materials such as polymers consisting of low-Z elements. However, the sensitivity to the materials can be improved drastically by X-ray phase imaging that detects X-ray refraction caused by the materials. X-ray Talbot or Talbot-Lau interferometry consisting of X-ray transmission gratings is now constructed in laboratories for X-ray phase imaging. X-ray phase tomography is also realized, enabling high-sensitive three-dimensional observation.
• X-ray phase imaging can be utilized for X-ray non-destructive testing of industrial products and baggage that cannot be checked conventionally.

We aim at appending a phase-contrast mode to micro-CT apparatuses and developing screening apparatuses in production lines.

• Electronic products can be operated not only by semiconductors but also by metal interconnections attached to the semiconductors. Required properties for the metal interconnections are ohmic contact, diffusion barrier property, adhesion with semiconductors, and low resistivity, corrosion resistance, process reliability. Our group has committed ourselves to develop new metals and processes to meet the needs of wide-ranged device producers with consideration of cost performance. Topics of our research include (1) Cu alloys to self-form a diffusion barrier layer in multilayer interconnection of Si devices, (2) Cu alloys to form a reaction-doping layer in IGZO oxide semiconductors, (3) Nb alloys to achieve mechanical and thermal reliability with good ohmic property for SiC power devices, (4) Cu alloys for transparent conductive oxide such as ITO, (5) screen-printable Cu paste lines for solar cells, etc..

Our research efforts are targeted at metallization and interconnections for advanced LSI, flat panel displays, touch panels, power modules, solar cells, and other electronic devices. Collaborators include material producers, equipment vendors, and device producers in the entire value chain of electronic products.

Colorful TiO2 Particle
https://www.t-technoarch.co.jp/data/anken_en/T19-849.pdf

Transition metal compounds are known to exhibit a wide variety of colors. Until now, it has been possible to color white titanium oxide by doping with transition metal ions, but it is difficult to avoid biotoxicity derived from transition metals.

• In the present invention, titanium oxide inorganic pigments that do not contain transition metals and have various colors such as white, yellow, red, gray, green, purple, black, and skin color have been realized.

New applications of titanium oxide pigments are expected in the cosmetics field, where biotoxicity is an issue.

• Our lab develops accurate nanometer scale characterization methods of crystal structures by convergent-beam electron diffraction (<strong>CBED</strong>) and electronic structures by electron energy-loss spectroscopy (EELS) and soft-X-ray emission spectroscopy (<strong>SXES</strong>) for evaluating new functional materials. For performing crystal structure studies, we developed a new Ω-filter electron microscope and a refinement soft-ware, which can perform not only atom positions but also electrostatic potential and charge distributions. For electronic structure studies, a high-resolution EELS microscope and SXES instruments were developed.

Collaborated research of Local structures (symmetry, polarity, lattice defects) by CBED and electronic structures (bandgap, dielectric property and chemical state) by EELS and SXES on semiconductors, metals and dielectric materials are acceptable. Instructions of those analysis methods are also acceptable.

• Highly-sensitive NMR technique has been developed by manipulation polarization of nuclear spins via control of transport characteristics in GaAs and InSb quantum structures. This highly-sensitive NMR can be applied to two-dimensional and nanostructures. Furthermore, ideal gate controllability has been demonstrated in InSb quantum structures with Al2 O3 dielectrics. More importantly, the concept of generalized coherence time was introduced, where noise characteristics felt by nuclear spins can be measured including their frequency dependence. This concept will bring about a change in all nuclear-spin related measurements.

Next generation InSb devices based on good gate controllability. Various nuclear-spin based measurements and NMR utilizing the concept of generalized coherence time. Highly-sensitive NMR is now important for fundamental physics studies. In the future, it will contribute to quantum information processing.