Design and Fabrication of Micro-Optical Devices Based on Optics, Especially Optical MEMS and Sensors

Features and Uniqueness
  • On the basis of optical engineering, optical technologies for sensing mechanical motion, spectroscopic properties, and other physical/chemical characteristics are investigated. Moreover, using semiconductor micro/nano-fabrication technology, integrated micro-optical sensors, micro/nano optical systems, optical micro-electro-mechanical systems (MEMS) are studied. Micro laser scanner for display, deformable mirror for telescope, optical displacement encoder, and fluorescent analysis system are the examples of research topics.
Practical Application

Optical design, Optical industries, Industries relating to semiconductor micro fabrication and MEMS, optical telecommunications, etc.



New Industry Creation Hatchery Center

Kazuhiro Hane, Specially Appointed Professor(Research)
Doctor of Engineering