M

[MEMS]

Minimally Invasive Medical Devices and Healthcare Devices Using Micro/Nano Machining Technology	HAGA, Yoichi (Professor)
Hands-On Access Fabrication Facility –Open Facility for MEMS and Semiconductor Prototyping–	TOTSU, Kentaro (Associate Professor)
MEMS/Micromachines and Microfabrication Technology	TANAKA, Shuji (Professor)
Design, fabrication and test of high performance miniaturized sensor and actuator systems	FROEMEL, Joerg (Associate Professor)