Tohoku University. Research Profiles

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Design and Fabrication of Micro-Optical Devices Based on Optics, Especially Optical MEMS and Sensors

update:2020-06-16
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Features

On the basis of optical engineering, optical technologies for sensing mechanical motion, spectroscopic properties, and other physical/chemical characteristics are investigated. Moreover, using semiconductor micro/nano-fabrication technology, integrated micro-optical sensors, micro/nano optical systems, optical micro-electro-mechanical systems (MEMS) are studied. Micro laser scanner for display, deformable mirror for telescope, optical displacement encoder, and fluorescent analysis system are the examples of research topics.

Targeted Application(s)/Industry

Optical design, Optical industries, Industries relating to semiconductor micro fabrication and MEMS, optical telecommunications, etc.

Researchers

Department of Nanomechanics, Graduate School of Engineering

HANE, Kazuhiro , Professor
Doctor of Engineering

Keywords

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