Design and Fabrication of Micro-Optical Devices Based on Optics, Especially Optical MEMS and Sensors
update：2021-07-07
Features
On the basis of optical engineering, optical technologies for sensing mechanical motion, spectroscopic properties, and other physical/chemical characteristics are investigated. Moreover, using semiconductor micro/nano-fabrication technology, integrated micro-optical sensors, micro/nano optical systems, optical micro-electro-mechanical systems (MEMS) are studied. Micro laser scanner for display, deformable mirror for telescope, optical displacement encoder, and fluorescent analysis system are the examples of research topics.Targeted Application(s)/Industry
Optical design, Optical industries, Industries relating to semiconductor micro fabrication and MEMS, optical telecommunications, etc.Researchers
New Industry Creation Hatchery Center
HANE Kazuhiro
, Professor
Doctor of Engineering
Keywords
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