Tohoku University. Research Profiles


Generation of Functional Interface by Micro/Meso Mechanical Manufacturing (M4 process) technology

Recently, micro parts, such as glass waveguide, micro lens array and holographic optical element, made from materials other than silicon are increasingly demanded. The sizes of the micro parts are below 1 mm (so-called sub-millimeter size), and the shapes are complex. As high hardness, high brittleness and high melting point predominate most of these materials, micro parts of these materials are particularly difficult to be machined, even by lithography techniques, laser beam and electron beam. Additionally, high efficiency and low cost micro manufacturing method is highly expected. Our lab concentrates on promoting innovations of mechanical manufacturing technologies to realize micro fabrication, especially on developing new processing principle of Micro/Meso Mechanical Manufacturing (M^4 process) at the frontier of manufacturing technology.
The M^4 process includes: 1. Aspherical micro-grinding, 2. Micro aspherical polishing 3. Micro cutting of aspheric micro lens array, 4. Micro abrasive jet machining (AJM), 5. Micro powder jet deposition (PJD), 6. Micro ultrasonic machining, 7. Micro Electrical discharge machining (EDM), 8. Micro laser machining.

・Strong Collaboration among Industry, Academia and Government
We believe that greater importance will be attached to cooperation among academic institutions and between academia and government in research, with the results being put to practical use through joint projects between academia and industry. The fundamental mission of our research group is to encourage joint research in industry. In addition, we frequently provide consultation regarding technological problems in various companies.


Graduate School of Biomedical Engineering

KURIYAGAWA, Tsunemoto , Professor
PhD (Engineering)