Tohoku University. Research Profiles


Vacuum Engineering of Solid-Liquid Interfaces and its Process Applications



We challenge to fabricate in vacuum-stabilized micro/nano-scale liquid materials, explore their novel chemicophysical properties and develop their vacuum processing applications. The representative examples include ultra thin film ionic liquid on the nanometer scale and advanced vapor-liquid-solid growth (VLS) of inorganic/organic materials, such as 4H- and 3C-SiC films, single crystal pentacene and a porous polymer film of plolythiophene.

Targeted Application(s)/Industry

Our research outcomes will contribute to the following research and development:
1) a next-generation semiconductor process with the merits of the wet process
2) a new purification process of organic semiconductors, by which some part of inorganic semiconductor materials would be replaced in response to the present world-wide shortage of semiconductors.

In addition, the consultation of how to use our ionic liquid-assisted vapor growth method in attempt to obtain organic single crystals is welcome.


School of Engineering

MATSUMOTO Yuji , Professor
Doctor of Science


Related Information

Y. Matsumoto and S. Maruyama,
“Laser deposition of nano-ionic liquids and their process applications in a vacuum,” in Ionic Liquid Devices, edited by A. Eftekhari Smart, Materials Series No. 28 (RSC, London, UK, 2018), Chap. 6.p. 136
DOI: 10.1039/9781788011839

A. Osumi, K. Nakano, N. Sannodo, S. Maruyama, Y. Matsumoto, T. Mitani, T. Kato, Y. Yonezawa, H. Okumura,
“Platinum additive impacts on vapor-liquid-solid growth chemical interface for high-quality SiC single crystal films”, Materials Today Chemistry,16,100266-1-8 (2020).
DOI: 10.1016/j.mtchem.2020.100266

Hikaru Watanabe, Ryoji Takazawa, Riuto Takahashi, Shingo Maruyama and Yuji Matsumoto,
“Nanogels Constituted of Polyurea Filled with an Ionic Liquid as an Electrolyte for Electric Double Layer Transistors”, ACS Appl. Nano Mater. 3, 9610-9615 (2020).
DOI: 10.1021/acsanm.0c02335