• Fukuyama laboratory studies novel material processing based on chemical thermodynamics with high-temperature thermophysical property measurements. As examples, we are developing new crystal growth processes to bring a breakthrough in nitride-semiconductor devices, which are promising materials for next-generation optical devices applied in environmental, medical, bio and information technologies fields. Database of thermophysical properties of materials is needed for modeling heat and mass transports in materials processes.

A new thermophysical property measurement system is currently under development, which enables accurate measurements of heat capacity, thermal conductivity, emissivity, density and surface tension of high-temperature melts, utilizing electromagnetic levitation in a dc magnetic field.

• One of our major research focuses is to design the novel drug nanoparticles, so called “Nano-prodrugs”, and to apply them as anticancer drugs or eye drops with excellent delivery efficiency. Nano-prodrugs are constructed by synthetic prodrugs molecules which contains poorly water-soluble substituent. They could be fabricated to nanoparticles with 100 nm or less in size by our reprecipitation technique, which has been used to create organic nanomaterials. We are aiming at practical application of our Nano-prodrugs in the near future.

Our reprecipitation technique for fabricating organic nanomaterials is a versatile technique that can be applied to various organic molecules as well as drug compounds. We hope to conduct collaborative research with a willing company on controlling and evaluating properties of the organic nanoparticles.

• Our focus is on the development of solid-state-ionics materials to be used for a variety of energy conversion systems. To further improve the performance of fuel cells and lithium batteries, novel ionic conductors and mixed conductors with high ionic conductivity and chemical stability are highly demanded. We have been developing such the materials based on defect chemistry and thermodynamics of ceramics, and trying to apply those materials to actual energy conversion devices.

To date, a hydrogen production system utilizing oxygen permeable membranes and an all-solid-state battery have been prepared.

• The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines, which are important items for ultra-precision manufacturing and nanomanufacturing. Optical sensors are being developed for measurement of angle and displacement, which are fundamental quantities for manufacturing. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as new multi-axis sensing methods are being The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines. Optical sensors are being developed for measurement of angle and displacement. A number of scanning-type measuring systems for precision measurement of surface forms and stage motions are also being developed. Error separation algorithms and systems for straightness and roundness, which are the most fundamental geometries treated in ultra-precision manufacturing, are being investigated. Novel systems based on scanning probe microscopy are under development for micro- and nano-structures as well as freeform optics in responding to new and important challenges from ultra-precision manufacturing and nanomanufacturing.

The multi-axis optical displacement and angle sensors developed in the laboratory are expected to measure motions of semiconductor/IC manufacturing and inspection equipment, precision machine tools, ultra-precision measuring instrument. The surface profile measurement systems are expected t play an important role in ultra-precision manufacturing and nanomanufacturing industries.

• Monoatomic layered materials of Graphene, Transition metal sulfide nanosheet, nanocrystalline active materials, nanoparticles and nanoporous materials are investigated for realizing high capacity, high power, high safety and low cost energy storage devices as a post- Lithium ion battery. Advanced chemistry of functional materials and device processes for All solid state battery, Magnesium battery, fuel cells, supercapacitor and wearable batteries are investigated.

Academia – Industry collaboration with manufacturing companies of functional materials, batteries, and also smart grid, renewable energy, electrical power companies are encouraged for developments of advanced energy materials and post-Lithium ion battery.

• We developed both pH and Cl- imaging plates, which can visualize the pH and Cl- concentration on metal surfaces in acidic environments. The pH range is from 3.0 to 0.5, and Cl- concentration up to 4 M can be measured. Fluorescent dyes are successively used for pH and Cl- imaging in the field of biology, but their sensitivity tends to be insufficient in acidic and/or highly concentrated chloride solutions. A glass plate with a sol-gel sensing layer, which contains a pH indicator or a Cl- sensitive florescent dye was fabricated and validated using the solutions with various pH values and Cl- concentrations. Changes in the pH and Cl- distribution on stainless surface in an acidic environment were measured quantitatively.

The newly developed imaging plates can be used to investigate the mechanism of various chemical reactions, such as corrosion, which occurs in an acidic environment. Micro-flow imaging using our sensing technique will be a promising approach to understand the catalytic chemistry of metal surfaces.
強調

• Electronic products can be operated not only by semiconductors but also by metal interconnections attached to the semiconductors. Required properties for the metal interconnections are ohmic contact, diffusion barrier property, adhesion with semiconductors, and low resistivity, corrosion resistance, process reliability. Our group has committed ourselves to develop new metals and processes to meet the needs of wide-ranged device producers with consideration of cost performance. Topics of our research include (1) Cu alloys to self-form a diffusion barrier layer in multilayer interconnection of Si devices, (2) Cu alloys to form a reaction-doping layer in IGZO oxide semiconductors, (3) Nb alloys to achieve mechanical and thermal reliability with good ohmic property for SiC power devices, (4) Cu alloys for transparent conductive oxide such as ITO, (5) screen-printable Cu paste lines for solar cells, etc..

Our research efforts are targeted at metallization and interconnections for advanced LSI, flat panel displays, touch panels, power modules, solar cells, and other electronic devices. Collaborators include material producers, equipment vendors, and device producers in the entire value chain of electronic products.

• Our research aims at developing methods, including instrumentation, for characterizing surface (or interface) at the nano-meter level. Most of our research subjects are related to the surface forces measurement, which can directly monitor the interaction between two surfaces. We study phenomena occurring at the solid-liquid interface such as adsorption and structuring of liquids. We have developed the resonance shear measurement which is a sensitive method for evaluating properties of confined liquid for nano-rheology and tribology. Twin-path surface forces apparatus we developed enabled us to study wide variety of samples such as metals, ceramics and plastics.

These methods are applicable for characterizing lubricants, nano-materials, paints, sealants, and cosmetics. We hope to conduct collaborative research with a willing company for a practical application of this technology in industry.