Tohoku University. Research Profiles


Hands-On Access Fabrication Facility –Open Facility for MEMS and Semiconductor Prototyping–



We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at the 1800m2 clean room, Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle is an open access that users can utilize the fab and operate the equipment by themselves. Users also can access a great deal of know-how accumulated at Tohoku University. More than 260 companies have utilized the fab for developing various devices. To accelerate University's R&D and education, product fabrication by a company user is started in July 2013.

Targeted Application(s)/Industry

Our target is MEMS and semiconductor devices including sensors (accelerometer, gyroscope, pressure sensor, force sensor, photo diode, radiation sensor, microphone, bio sensor), solar cell, RF device, optical device, micro actuator. Process technology, such as etching, sputtering, oxidation/diffusion, CVD and bonding is also available.


Micro System Integration Center

TOTSU Kentaro , Professor
Doctor of Engineering


Related Information

MEMS research is better together[Nature electronics, 2, 2019, 134-136]

Accelerating MEMS Development by Open Collaboration at Hands-On-Access Fab, Tohoku University[Sens. Mater., 30, 2018, 701-711]