• 　Using laser fabrication, we are developing techniques to enhance material surface properties and functionality. For example, to create a functional interface, we aim to clarify, by way of simulation and experimentation, the phenomenon that occurs when the surface of a material is irradiated using a laser beam.
• 　We expect that the results of our research will be widely applicable, including biomedical devices.
• ■　Creation of biocompatible surfaces
• 　Materials used for artificial organs, vessels, and other bio-implants require excellent tissue and cell biocompatibility. Therefore, we are exploring the creation of biocompatible surfaces using a new laser irradiation process in this study.
• 　We have succeeded in imparting a biologically active function to titanium-based materials by applying the laser irradiation technique. When such a material that has a biologically active function is inserted in a living body, hydroxyapatite (the principal constituent of bones and teeth) precipitates on the surface. Using the laser irradiation technique, we can manufacture bone-adherent implants, and we envisage their application to artificial joints or dental implants.
• 　This research aims to discover such breakthrough solutions for biomedical applications using the laser irradiation technique.

• On the basis of optical engineering, optical technologies for sensing mechanical motion, spectroscopic properties, and other physical/chemical characteristics are investigated. Moreover, using semiconductor micro/nano-fabrication technology, integrated micro-optical sensors, micro/nano optical systems, optical micro-electro-mechanical systems (MEMS) are studied. Micro laser scanner for display, deformable mirror for telescope, optical displacement encoder, and fluorescent analysis system are the examples of research topics.

Optical design, Optical industries, Industries relating to semiconductor micro fabrication and MEMS, optical telecommunications, etc.

• Micro and nano electro-mechanical systems (MEMS/NEMS) have completely changed human society in the past decades. Many devices that are taken for granted these days like smart phone, future car and drone would be unthinkable without them.
• The integration of various new kinds of materials, such as metallic glass and nanostructures into micro technologies allows us to create devices with novel performance and characteristics; examples include acoustic sensors and actuators, thermoelectric generators and wafer level packages.
• In collaboration with partners inside and outside Tohoku University, technologies are being developed that can be transferred to industry ranging from material integration and processes to packaging and reliability.

Wide collaboration in Microsystem technology is possible. We develop, implement and optimize processes, devices and systems until they are ready for use, keeping in mind reliability, yield and other important features for commercialization. We work with also with partners, such as Fraunhofer. Flexible interlinking of expertise and capacities with other research groups enables us to meet broad project requirements and create complex system solutions.

• Most innovations have been triggered by advent of new materials. We focus on to explore new inorganic materials and their synthesis routes on the basis of our knowledge about the material design and various materials processing technologies. We develop proton conducting phosphate glasses working at intermediate temperatures and narrow gap oxide semiconductors applicable in visible and NIR regions. Thin-film solar cells, fuel cells using those materials are also developing.

We focus on oxide semiconductors and proton conducting electrolytes and electrodes in order to apply them in solar cells, fuel cells, light-emitting devices. But, applicable area of our technologies is not limited in those applications.

• We are developing a new continuous flow type process for supercritical reactions. Under the supercritical state, the organic molecules and metal salt aqueous solutions are miscible and water molecule works as an acid/base catalyst which leads to rapid reactions. In order to apply such new reaction fields to an industrial process, it is necessary to establish the process design basis by understanding phenomena in the reaction fields, on the basis of phase equilibrium, flux and reaction kinetics theory. So while developing a process, we are doing research for the establishment of the process design basis.

Examples are a process for the synthesis of organic modified nanoparticles (MPs), a process for the pretreatment and solubilization of biomass in the supercritical/subcritical water and a process for the refinery of heavy oil in the supercritical water.

• Toward the ultimate performances of image sensors, advanced research activities are being conducted that cover a wide range of technology fields from cleanroom infrastructure, materials, process equipment, process, device, circuit, assembly, signal processing, measurement/evaluation and reliability. Following technologies have been successfully commercialized:
• A fast and accurate measurement technology of electrical characteristics for over 1 million transistors
• A wide dynamic range CMOS image sensor technology capturing images over five decade brightness ranges
• An ultra-fast CMOS image sensor technology with 10 million frames/sec

Followings are available for industry collaborators:
A. 200mm-diameter-wafer silicon device fabrication utilizing the ultra-clean facility including wafer mutual fabrication processing between device manufacturers.
B. Process technology development and various kinds of analyses.
C. Development of new image sensors.