• The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines, which are important items for ultra-precision manufacturing and nanomanufacturing. Optical sensors are being developed for measurement of angle and displacement, which are fundamental quantities for manufacturing. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as new multi-axis sensing methods are being The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines. Optical sensors are being developed for measurement of angle and displacement. A number of scanning-type measuring systems for precision measurement of surface forms and stage motions are also being developed. Error separation algorithms and systems for straightness and roundness, which are the most fundamental geometries treated in ultra-precision manufacturing, are being investigated. Novel systems based on scanning probe microscopy are under development for micro- and nano-structures as well as freeform optics in responding to new and important challenges from ultra-precision manufacturing and nanomanufacturing.

The multi-axis optical displacement and angle sensors developed in the laboratory are expected to measure motions of semiconductor/IC manufacturing and inspection equipment, precision machine tools, ultra-precision measuring instrument. The surface profile measurement systems are expected t play an important role in ultra-precision manufacturing and nanomanufacturing industries.

• Our focus is on the development of solid-state-ionics materials to be used for a variety of energy conversion systems. To further improve the performance of fuel cells and lithium batteries, novel ionic conductors and mixed conductors with high ionic conductivity and chemical stability are highly demanded. We have been developing such the materials based on defect chemistry and thermodynamics of ceramics, and trying to apply those materials to actual energy conversion devices.

To date, a hydrogen production system utilizing oxygen permeable membranes and an all-solid-state battery have been prepared.

• We develop technology of the cyclotron accelerator and its application as follows. 1)Ion source (particularly heavy ion source), 2)design of ion optics, 3)device control system for the cyclotron, 4)RF system, 5)detectors for charged particles, gamma ray, and neutron, 6) radiation test by ion and neutron beam.

We have beam lines dedicated to the neutron irradiation and the ion irradiation, respectively. We can provide fast neutron beam (20-70 MeV), and various ion beam such as p, alpha, and heavy ions up to Xe. We also develop a neutron imaging technique using fast neutron.

• Recently, with a spread of high definition video streaming services and ubiquitous network, development of high-quality, ultra-realistic and low-power display systems has been demanded. We have been studying physical properties of liquid crystal materials, precise control technique of polarization, high performance liquid crystal display (LCD) devices and its application to the advanced display systems for the realization of new media such as electric paper display and digital signage display, and low-energy society. We established a polarization control technology which realizes a precise control of polarization with liquid crystal materials. By using this world-leading technology, we have been studying the control of the surface alignment of liquid crystal molecules and developed a wide-viewing angle and fast switching liquid crystal display, ultra-high definition field-sequential-color display (Fig. 1), ultra-low power reflective full-color display (Fig. 2) and large-size high-quality display system.
• We are also studying the ultra-realistic display systems such as a spatial 3D display and a multiple directional viewing display based on the precise light control technique as a next generation interactive communication technologies (Fig.3). We hope to conduct collaborative research with a willing company for a practical application of this technology in industry.

• A new dry-contact technique for transduction of broadband, high-frequency ultrasound via a solid layer inserted between water and the sample, whereat the pressure of about 0.1 MPa is applied at the layer/sample interface by evacuating air between them, has been developed. Based on the technique, acoustic imaging of an electronic package is realized under the dry environment (Fig. 1). Typically, the polymer films are used as the intermediate layer for water protection of the sample, and by utilizing the acoustic resonance phenomenon among water, film and the sample, higher quality acoustic image of the testing sample than that for the water immersion case can be recorded without getting the sample wet (Fig. 2). Moreover, thin materials, e.g., polymer film (Fig. 3), etc. can be characterized by analyzing the acoustic resonance phenomenon among the three media. We hope to conduct collaborative research with a willing company for a practical application of this technology in industry.

• 1) We investigate interesting properties of nanostructures and develop materials and devices utilizing nanostructures.
• 2) We have techniques and skills on low-noise electric measurements, cryogenics, nanofabrication, and data informatics. We are open to new collaborations.