• We are studying MEMS (Micro Electro Mechanical Systems) and related technologies, which are typically used for the input/output of information/communication devices, the safety of automobiles etc. Our representative topics include integrated sensors, piezoelectric devices, RF MEMS, micro energy devices and wafer-level packages. Our facilities are open-accessible and well equipped with a lot of tools for lithography, dry/wet etching, thin film deposition, wafer bonding, device mounting and evaluations, which can be operated by each researcher. Using these tools, a variety of MEMS are being prototyped. Also, new microfabrication tools are being developed by ourselves.

We are collaborating with many companies, from which visiting researchers are dispatched to our laboratory. We also accept companies which want to just use specific tools in our facilities. Consultation is always welcome.

• Microwave processing is one of the attractive fields in recent materials processing. We perform various materials processing using non-equilibrium reaction field induced by microwave and/or ultrasonic irradiation. The topic contains powder metallurgy, nitride coatings, synthesis of new functional materials, fabrication of nanoparticles, etc. Recently we have developed a new TiN coating method using our microwave irradiation equipment operated at a frequency of 2.45 GHz. The method is simple but applicable to various substrates with complex shape. This method can be applied to various nitride coatings and will open a new coating technology in many fields of applications.

The major targets of TiN coatings are for cutting tools, ball bearings, dental implants, die and mold for stamping, and ornaments. The newly developed method makes it possible to perform nitride coatings within a short time using a standard microwave heating equipment. We hope to conduct collaborative research with a willing company for a practical application of these technology.

• Molecular-scale mechanism of solid-liquid affinity, wettability, thermal boundary resistance and molecular deposition are analyzed by molecular dynamics simulations toward its control. With a background of heat and mass transport and interfacial thermodynamics, transport phenomena of various scales ranging from spin coating of photoresist to SAM (self-assembled monolayer) and hydrophobic/hydrophilic treatment by attaching some molecular basis are studied. Futhermore, the molecular-scale mechanisms which determine thermophysical properties and the molecular structure that realizes desired thermophysical properties are studied. We can conduct effective collaboration and provide academic consultations to companies interested in our research.

• To apply the specific properties of nano materials for the industrial products, various technologies, such as synthesis method for single phase alloy nanoparticles which shows the effective activity for aimed reaction, that for well crystallized alloy nanoparticles which shows the resistively against for undesirable reaction, and that for single layered surface control method, etc, is developed by precise control of metal complexes in the solution by using the calculation and various research equipment including the photon factory.

Our technology can be useful for various industry which need the restrict control of surface properties, such as catalysts and electronics.

• For further social development, it is required the miniaturization, weight saving, high performance of various devices. We study on fiber, particle reinforced polymer, metal, ceramic matrices composite materials using our knowledge about materials mechanics and numerical simulation such as finite element method. We recently address to develop multi-functionalized composite materials, which have high strength, super lightweight, energy harvesting function, damage monitoring function, biodegradable at the same time.

• Our lab develops accurate nanometer scale characterization methods of crystal structures by convergent-beam electron diffraction (<strong>CBED</strong>) and electronic structures by electron energy-loss spectroscopy (EELS) and soft-X-ray emission spectroscopy (<strong>SXES</strong>) for evaluating new functional materials. For performing crystal structure studies, we developed a new Ω-filter electron microscope and a refinement soft-ware, which can perform not only atom positions but also electrostatic potential and charge distributions. For electronic structure studies, a high-resolution EELS microscope and SXES instruments were developed.

Collaborated research of Local structures (symmetry, polarity, lattice defects) by CBED and electronic structures (bandgap, dielectric property and chemical state) by EELS and SXES on semiconductors, metals and dielectric materials are acceptable. Instructions of those analysis methods are also acceptable.

• In contrast to other scattering techniques, such as x-ray and electron diffractions, neutron scattering has the following advantages: 1) light atoms, such as H and Li, can be detected; 2) electron spins can be detected; 3) low energy excitations can be investigated. Using the neutron scattering technique, we search for macroscopic quantum phenomena in many-body electron systems, such as macroscopic singlet ground states in the quantum frustrated magnets and spin-fluctuation-mediated unconventional superconductors.

As noted above, neutron scattering can be used for investigating magnetic structure, spin dynamics, light atom positions in crystalline materials and their dynamics. Hence, this technique is very useful when those pieces of information are to be known.