• A new dry-contact technique for transduction of broadband, high-frequency ultrasound via a solid layer inserted between water and the sample, whereat the pressure of about 0.1 MPa is applied at the layer/sample interface by evacuating air between them, has been developed. Based on the technique, acoustic imaging of an electronic package is realized under the dry environment (Fig. 1). Typically, the polymer films are used as the intermediate layer for water protection of the sample, and by utilizing the acoustic resonance phenomenon among water, film and the sample, higher quality acoustic image of the testing sample than that for the water immersion case can be recorded without getting the sample wet (Fig. 2). Moreover, thin materials, e.g., polymer film (Fig. 3), etc. can be characterized by analyzing the acoustic resonance phenomenon among the three media. We hope to conduct collaborative research with a willing company for a practical application of this technology in industry.

• We are studying MEMS (Micro Electro Mechanical Systems) and related technologies, which are typically used for the input/output of information/communication devices, the safety of automobiles etc. Our representative topics include integrated sensors, piezoelectric devices, RF MEMS, micro energy devices and wafer-level packages. Our facilities are open-accessible and well equipped with a lot of tools for lithography, dry/wet etching, thin film deposition, wafer bonding, device mounting and evaluations, which can be operated by each researcher. Using these tools, a variety of MEMS are being prototyped. Also, new microfabrication tools are being developed by ourselves.

We are collaborating with many companies, from which visiting researchers are dispatched to our laboratory. We also accept companies which want to just use specific tools in our facilities. Consultation is always welcome.

• We are studying MEMS (Micro Electro Mechanical Systems) and related technologies, which are typically used for the input/output of information/communication devices, the safety of automobiles etc. Our representative topics include integrated sensors, piezoelectric devices, RF MEMS, micro energy devices and wafer-level packages. Our facilities are open-accessible and well equipped with a lot of tools for lithography, dry/wet etching, thin film deposition, wafer bonding, device mounting and evaluations, which can be operated by each researcher. Using these tools, a variety of MEMS are being prototyped. Also, new microfabrication tools are being developed by ourselves.

We are collaborating with many companies, from which visiting researchers are dispatched to our laboratory. We also accept companies which want to just use specific tools in our facilities. Consultation is always welcome.

• Micro and nano electro-mechanical systems (MEMS/NEMS) have completely changed human society in the past decades. Many devices that are taken for granted these days like smart phone, future car and drone would be unthinkable without them.
• The integration of various new kinds of materials, such as metallic glass and nanostructures into micro technologies allows us to create devices with novel performance and characteristics; examples include acoustic sensors and actuators, thermoelectric generators and wafer level packages.
• In collaboration with partners inside and outside Tohoku University, technologies are being developed that can be transferred to industry ranging from material integration and processes to packaging and reliability.

Wide collaboration in Microsystem technology is possible. We develop, implement and optimize processes, devices and systems until they are ready for use, keeping in mind reliability, yield and other important features for commercialization. We work with also with partners, such as Fraunhofer. Flexible interlinking of expertise and capacities with other research groups enables us to meet broad project requirements and create complex system solutions.

• Monoatomic layered materials of Graphene, Transition metal sulfide nanosheet, nanocrystalline active materials, nanoparticles and nanoporous materials are investigated for realizing high capacity, high power, high safety and low cost energy storage devices as a post- Lithium ion battery. Advanced chemistry of functional materials and device processes for All solid state battery, Magnesium battery, fuel cells, supercapacitor and wearable batteries are investigated.

Academia – Industry collaboration with manufacturing companies of functional materials, batteries, and also smart grid, renewable energy, electrical power companies are encouraged for developments of advanced energy materials and post-Lithium ion battery.

• Microstructure represents various kinds of heterogeneities in the metallic materials, i.e., grains, component phase, lattice defects and chemical inhomogeneity such as impurity/alloying elements. It can be modified through control of phase transformation/precipitation and deformation/recrystallization by adjusting compositions of materials and/or through processing routes (heat treatment, deformation). Such expertise in micro/nanostructure control is very important in production of current materials from viewpoints of energy saving and recycling in structural materials such as steels and titanium alloys.
• We attempt to apply more advanced control of micro/nanostructures, such as atomic structures of crystalline interfaces, chemistory in an atomic scale (e.g., segregation) and so on. Fundamentals of microstructure formation (thermodynamics, kinetics, crystallography) are examined both theoretically and experimentally to clarify key factors for microstructure control. Another important aspect in our research is the improvement of mechanical property by microstructure manipulation.

Possibilities to establish new functions (e.g., superplasticity, shape memory/superelasticity) as well as superior mechanical properties (e.g., ultrahigh strength with high toughness/ductility) is also explored.