• Molecular-scale mechanism of solid-liquid affinity, wettability, thermal boundary resistance and molecular deposition are analyzed by molecular dynamics simulations toward its control. With a background of heat and mass transport and interfacial thermodynamics, transport phenomena of various scales ranging from spin coating of photoresist to SAM (self-assembled monolayer) and hydrophobic/hydrophilic treatment by attaching some molecular basis are studied. Futhermore, the molecular-scale mechanisms which determine thermophysical properties and the molecular structure that realizes desired thermophysical properties are studied. We can conduct effective collaboration and provide academic consultations to companies interested in our research.

• Our research aims at developing methods, including instrumentation, for characterizing surface (or interface) at the nano-meter level. Most of our research subjects are related to the surface forces measurement, which can directly monitor the interaction between two surfaces. We study phenomena occurring at the solid-liquid interface such as adsorption and structuring of liquids. We have developed the resonance shear measurement which is a sensitive method for evaluating properties of confined liquid for nano-rheology and tribology. Twin-path surface forces apparatus we developed enabled us to study wide variety of samples such as metals, ceramics and plastics.

These methods are applicable for characterizing lubricants, nano-materials, paints, sealants, and cosmetics. We hope to conduct collaborative research with a willing company for a practical application of this technology in industry.

• Microstructure represents various kinds of heterogeneities in the metallic materials, i.e., grains, component phase, lattice defects and chemical inhomogeneity such as impurity/alloying elements. It can be modified through control of phase transformation/precipitation and deformation/recrystallization by adjusting compositions of materials and/or through processing routes (heat treatment, deformation). Such expertise in micro/nanostructure control is very important in production of current materials from viewpoints of energy saving and recycling in structural materials such as steels and titanium alloys.
• We attempt to apply more advanced control of micro/nanostructures, such as atomic structures of crystalline interfaces, chemistory in an atomic scale (e.g., segregation) and so on. Fundamentals of microstructure formation (thermodynamics, kinetics, crystallography) are examined both theoretically and experimentally to clarify key factors for microstructure control. Another important aspect in our research is the improvement of mechanical property by microstructure manipulation.

Possibilities to establish new functions (e.g., superplasticity, shape memory/superelasticity) as well as superior mechanical properties (e.g., ultrahigh strength with high toughness/ductility) is also explored.

• The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines, which are important items for ultra-precision manufacturing and nanomanufacturing. Optical sensors are being developed for measurement of angle and displacement, which are fundamental quantities for manufacturing. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as new multi-axis sensing methods are being The research is being focused on measurement of surface forms of precision workpieces and stage motions of precision machines. Optical sensors are being developed for measurement of angle and displacement. A number of scanning-type measuring systems for precision measurement of surface forms and stage motions are also being developed. Error separation algorithms and systems for straightness and roundness, which are the most fundamental geometries treated in ultra-precision manufacturing, are being investigated. Novel systems based on scanning probe microscopy are under development for micro- and nano-structures as well as freeform optics in responding to new and important challenges from ultra-precision manufacturing and nanomanufacturing.

The multi-axis optical displacement and angle sensors developed in the laboratory are expected to measure motions of semiconductor/IC manufacturing and inspection equipment, precision machine tools, ultra-precision measuring instrument. The surface profile measurement systems are expected t play an important role in ultra-precision manufacturing and nanomanufacturing industries.

• We challenge to fabricate in vacuum-stabilized micro/nano-scale liquid materials, explore their novel chemicophysical properties and develop their vacuum processing applications. The representative examples include ultra thin film ionic liquid on the nanometer scale and advanced vapor-liquid-solid growth (VLS) of inorganic/organic materials, such as 4H- and 3C-SiC films, single crystal pentacene and a porous polymer film of plolythiophene.

Our research outcomes will contribute to the following research and development:
1) a next-generation semiconductor process with the merits of the wet process
2) a new purification process of organic semiconductors, by which some part of inorganic semiconductor materials would be replaced in response to the present world-wide shortage of semiconductors.

In addition, the consultation of how to use our ionic liquid-assisted vapor growth method in attempt to obtain organic single crystals is welcome.

• We successfully realized millisecond-order X-ray phase tomography using a fringe-scanning method in grating-based X-ray interferometry. We obtained phase tomograms with a measurement time of 4.43 ms using a white synchrotron X-ray beam. The use of a fringe-scanning method enables us to achieve not only a higher spatial resolution but also a higher signal-to-noise ratio than that attained by the Fourier transform method. In addition, our approach can be applied to realize four-dimensional or high-throughput X-ray tomography for samples that can be rotated at a high speed.